Spacer Engineered FinFET Architectures
By Sudeb Dasgupta, Brajesh Kumar Kaushik & Pankaj Kumar Pal
- Release Date: 2017-06-26
- Genre: Electrical Engineering
This book focusses on the spacer engineering aspects of novel MOS-based device–circuit co-design in sub-20nm technology node, its process complexity, variability, and reliability issues. It comprehensively explores the FinFET/tri-gate architectures with their circuit/SRAM suitability and tolerance to random statistical variations.